Analysis of the Structure of Multilayer Nanocrystalline Coatings Based on Plasma Mass Transfer Parameters Calculated by the Monte Carlo Method
- 作者: Chernogor A.1, Blinkov I.1, Belov D.1, Sergevnin V.1, Volkhonskii A.1
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隶属关系:
- National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
- 期: 卷 45, 编号 2 (2019)
- 页面: 75-78
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/208197
- DOI: https://doi.org/10.1134/S1063785019020056
- ID: 208197
如何引用文章
详细
The results of the simulation of plasma fluxes onto the surface of rotating substrates during the combustion of a vacuum arc of the Cr–Ti–Mo cathode system are presented. The structure and composition of the arc-PVD Ti0.15Cr0.74Mo0.11N0.84 coatings are experimentally studied. The numerical simulation results of the coating structures based on experimental data were analyzed. The possibility of the simulation of the structure of multilayer, multicomponent coatings and the concentration distribution of chemical elements and its components is shown by calculating the plasma fluxes using the Monte Carlo method.
作者简介
A. Chernogor
National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
编辑信件的主要联系方式.
Email: avchernogor@gmail.com
俄罗斯联邦, Moscow
I. Blinkov
National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
Email: avchernogor@gmail.com
俄罗斯联邦, Moscow
D. Belov
National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
Email: avchernogor@gmail.com
俄罗斯联邦, Moscow
V. Sergevnin
National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
Email: avchernogor@gmail.com
俄罗斯联邦, Moscow
A. Volkhonskii
National University of Science and Technology MISIS (Moscow Institute of Steel andf Alloys)
Email: avchernogor@gmail.com
俄罗斯联邦, Moscow