A New Approach to TOF-SIMS Analysis of the Phase Composition of Carbon-Containing Materials
- 作者: Drozdov M.1, Drozdov Y.1, Okhapkin A.1, Kraev S.1, Lobaev M.2
-
隶属关系:
- Institute for Physics of Microstructures, Russian Academy of Sciences
- Institute of Applied Physics, Russian Academy of Sciences
- 期: 卷 45, 编号 1 (2019)
- 页面: 48-52
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/208190
- DOI: https://doi.org/10.1134/S1063785019010231
- ID: 208190
如何引用文章
详细
New possibilities offered by the method of secondary ion mass spectrometry (SIMS) for analysis of the phase composition of carbon-containing materials are considered. Differences are established between the mass spectra of three carbon phases: diamond, diamond-like carbon (DLC), and graphite. A simple algorithm for the quantitative determination of different phases in two-phase systems diamond–graphite and DLC–graphite is proposed that is based on the measurement of relative intensities of secondary cluster ions such as C8/C5 and CsC8/CsC4. It is shown that nonuniform depth profiles of various carbon phases are formed in diamond structures upon laser cutting and in DLC structures upon thermal annealing.
作者简介
M. Drozdov
Institute for Physics of Microstructures, Russian Academy of Sciences
编辑信件的主要联系方式.
Email: drm@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
Yu. Drozdov
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: drm@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
A. Okhapkin
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: drm@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
S. Kraev
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: drm@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
M. Lobaev
Institute of Applied Physics, Russian Academy of Sciences
Email: drm@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950