A New Approach to TOF-SIMS Analysis of the Phase Composition of Carbon-Containing Materials
- Authors: Drozdov M.N.1, Drozdov Y.N.1, Okhapkin A.I.1, Kraev S.A.1, Lobaev M.V.2
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Affiliations:
- Institute for Physics of Microstructures, Russian Academy of Sciences
- Institute of Applied Physics, Russian Academy of Sciences
- Issue: Vol 45, No 1 (2019)
- Pages: 48-52
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/208190
- DOI: https://doi.org/10.1134/S1063785019010231
- ID: 208190
Cite item
Abstract
New possibilities offered by the method of secondary ion mass spectrometry (SIMS) for analysis of the phase composition of carbon-containing materials are considered. Differences are established between the mass spectra of three carbon phases: diamond, diamond-like carbon (DLC), and graphite. A simple algorithm for the quantitative determination of different phases in two-phase systems diamond–graphite and DLC–graphite is proposed that is based on the measurement of relative intensities of secondary cluster ions such as C8/C5 and CsC8/CsC4. It is shown that nonuniform depth profiles of various carbon phases are formed in diamond structures upon laser cutting and in DLC structures upon thermal annealing.
About the authors
M. N. Drozdov
Institute for Physics of Microstructures, Russian Academy of Sciences
Author for correspondence.
Email: drm@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950
Yu. N. Drozdov
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: drm@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950
A. I. Okhapkin
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: drm@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950
S. A. Kraev
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: drm@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950
M. V. Lobaev
Institute of Applied Physics, Russian Academy of Sciences
Email: drm@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950