A holographic method of the quantitative measurement of photolithographic replicas of thick raised surface defects
- 作者: Budnikov N.1, Dudenkova V.1, Kotomina V.1, Morozov O.1, Semenov V.2
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隶属关系:
- Lobachevsky State University of Nizhny Novgorod
- Razuvaev Institute of Organometallic Chemistry
- 期: 卷 43, 编号 6 (2017)
- 页面: 539-541
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/204916
- DOI: https://doi.org/10.1134/S1063785017060050
- ID: 204916
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详细
To solve the problem of the evaluation of the characteristic sizes and patterns of surface microdefects of complex-shaped samples, a holographic method for the measurement of transparent replicas representing an inverse impression of the investigated surface is proposed. This measurement method is based on the digital registration of the interferograms of a polymeric replica in the modified off-axis Leith–Upatnieks holographic scheme and on the calculation of the phase-incursion difference from a series of reconstructed digital holograms.
作者简介
N. Budnikov
Lobachevsky State University of Nizhny Novgorod
Email: orannge@mail.ru
俄罗斯联邦, Nizhny Novgorod, 603022
V. Dudenkova
Lobachevsky State University of Nizhny Novgorod
编辑信件的主要联系方式.
Email: orannge@mail.ru
俄罗斯联邦, Nizhny Novgorod, 603022
V. Kotomina
Lobachevsky State University of Nizhny Novgorod
Email: orannge@mail.ru
俄罗斯联邦, Nizhny Novgorod, 603022
O. Morozov
Lobachevsky State University of Nizhny Novgorod
Email: orannge@mail.ru
俄罗斯联邦, Nizhny Novgorod, 603022
V. Semenov
Razuvaev Institute of Organometallic Chemistry
Email: orannge@mail.ru
俄罗斯联邦, Nizhny Novgorod, 603950