The influence of growth conditions on the surface morphology and development of mechanical stresses in Al(Ga)N layers during metalorganic vapor phase epitaxy
- 作者: Lundin W.1, Zavarin E.1, Brunkov P.1, Yagovkina M.1, Troshkov S.1, Sakharov A.1, Nikolaev A.1, Tsatsulnikov A.1
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隶属关系:
- Ioffe Physical Technical Institute
- 期: 卷 42, 编号 4 (2016)
- 页面: 431-434
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/198846
- DOI: https://doi.org/10.1134/S1063785016040192
- ID: 198846
如何引用文章
详细
We have studied the influence of technological parameters on the surface morphology and development of mechanical stresses in Al(Ga)N layers during their growth by metalorganic vapor phase epitaxy (MOVPE) on sapphire substrates. Minimization of tensile stresses under conditions of a retained atomically smooth surface can be achieved by using a combination of factors including (i) nitridation of substrate in ammonia flow, (ii) formation of two-layer AlN–Al(Ga)N structures by introducing a small amount (several percent) of Ga after growth of a thin AlN layer, and (iii) reduction of ammonia flow during growth of an Al(Ga)N layer.
作者简介
W. Lundin
Ioffe Physical Technical Institute
编辑信件的主要联系方式.
Email: lundin.vpegroup@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
E. Zavarin
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
P. Brunkov
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
M. Yagovkina
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
S. Troshkov
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
A. Sakharov
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
A. Nikolaev
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
A. Tsatsulnikov
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021