The influence of growth conditions on the surface morphology and development of mechanical stresses in Al(Ga)N layers during metalorganic vapor phase epitaxy
- Authors: Lundin W.V.1, Zavarin E.E.1, Brunkov P.N.1, Yagovkina M.A.1, Troshkov S.I.1, Sakharov A.V.1, Nikolaev A.E.1, Tsatsulnikov A.F.1
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Affiliations:
- Ioffe Physical Technical Institute
- Issue: Vol 42, No 4 (2016)
- Pages: 431-434
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/198846
- DOI: https://doi.org/10.1134/S1063785016040192
- ID: 198846
Cite item
Abstract
We have studied the influence of technological parameters on the surface morphology and development of mechanical stresses in Al(Ga)N layers during their growth by metalorganic vapor phase epitaxy (MOVPE) on sapphire substrates. Minimization of tensile stresses under conditions of a retained atomically smooth surface can be achieved by using a combination of factors including (i) nitridation of substrate in ammonia flow, (ii) formation of two-layer AlN–Al(Ga)N structures by introducing a small amount (several percent) of Ga after growth of a thin AlN layer, and (iii) reduction of ammonia flow during growth of an Al(Ga)N layer.
About the authors
W. V. Lundin
Ioffe Physical Technical Institute
Author for correspondence.
Email: lundin.vpegroup@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
E. E. Zavarin
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
P. N. Brunkov
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
M. A. Yagovkina
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
S. I. Troshkov
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
A. V. Sakharov
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
A. E. Nikolaev
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
A. F. Tsatsulnikov
Ioffe Physical Technical Institute
Email: lundin.vpegroup@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021