Crystallization of amorphous hydrogenated silicon (a-Si:H) films under irradiation with femtosecond laser pulses


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Resumo

Crystallization of thin films of amorphous hydrogenated silicon under the irradiation of femtosecond laser pulses has been studied. It was found that the crystallization has a clearly pronounced threshold nature and depends on the laser emission wavelength. As shown the best results are achieved in crystallization at the laser wavelength range of 740–760 nm.

Sobre autores

V. Belik

Ioffe Physical Technical Institute

Autor responsável pela correspondência
Email: v.belik@mail.ioffe.ru
Rússia, St. Petersburg, 194021

O. Vasyutinskii

Ioffe Physical Technical Institute

Email: v.belik@mail.ioffe.ru
Rússia, St. Petersburg, 194021

A. Kukin

Ioffe Physical Technical Institute

Email: v.belik@mail.ioffe.ru
Rússia, St. Petersburg, 194021

M. Petrov

Ioffe Physical Technical Institute; Peter the Great St. Petersburg Polytechnic University

Email: v.belik@mail.ioffe.ru
Rússia, St. Petersburg, 194021; St. Petersburg, 195251

R. Popov

Ioffe Physical Technical Institute; Peter the Great St. Petersburg Polytechnic University

Email: v.belik@mail.ioffe.ru
Rússia, St. Petersburg, 194021; St. Petersburg, 195251

E. Terukov

Ioffe Physical Technical Institute; R&D Center for Thin-Film Technologies in Energetics

Email: v.belik@mail.ioffe.ru
Rússia, St. Petersburg, 194021; St. Petersburg, 194064


Declaração de direitos autorais © Pleiades Publishing, Ltd., 2016

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