Ferroelectric films of barium strontium titanate on semi-insulating silicon carbide substrates
- Autores: Tumarkin A.1, Razumov S.1, Gagarin A.1, Odinets A.1, Mikhailov A.1,2, Pronin I.3, Stozharov V.4, Senkevich S.3, Travin N.5
-
Afiliações:
- St. Petersburg State Electrotechnical University (LETI)
- Dagestan State University
- Ioffe Physical Technical Institute
- Herzen State Pedagogical University of Russia
- Svetlana–Electronpribor Corporation
- Edição: Volume 42, Nº 4 (2016)
- Páginas: 423-426
- Seção: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/198792
- DOI: https://doi.org/10.1134/S1063785016040271
- ID: 198792
Citar
Resumo
Thin ferroelectric BaxSr1–xTiO3 (BST) layers have been grown for the first time on semi-insulating silicon carbide substrates by RF magnetron sputtering of a ceramic target without using buffer sublayers. Results of investigation of the structure of obtained BST films and the electrical properties of related planar capacitors are presented. The obtained structures are characterized by high nonlinearity and low dielectric losses at microwave frequencies.
Palavras-chave
Sobre autores
A. Tumarkin
St. Petersburg State Electrotechnical University (LETI)
Autor responsável pela correspondência
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 197376
S. Razumov
St. Petersburg State Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 197376
A. Gagarin
St. Petersburg State Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 197376
A. Odinets
St. Petersburg State Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 197376
A. Mikhailov
St. Petersburg State Electrotechnical University (LETI); Dagestan State University
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 197376; Makhachkala, Dagestan, 367000
I. Pronin
Ioffe Physical Technical Institute
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 194021
V. Stozharov
Herzen State Pedagogical University of Russia
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 191186
S. Senkevich
Ioffe Physical Technical Institute
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 194021
N. Travin
Svetlana–Electronpribor Corporation
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 194156