Email this article Ferroelectric films of barium strontium titanate on semi-insulating silicon carbide substrates
- Authors: Tumarkin A.V.1, Razumov S.V.1, Gagarin A.G.1, Odinets A.A.1, Mikhailov A.K.1,2, Pronin I.P.3, Stozharov V.M.4, Senkevich S.V.3, Travin N.K.5
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Affiliations:
- St. Petersburg State Electrotechnical University (LETI)
- Dagestan State University
- Ioffe Physical Technical Institute
- Herzen State Pedagogical University of Russia
- Svetlana–Electronpribor Corporation
- Issue: Vol 42, No 4 (2016)
- Pages: 423-426
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/198792
- DOI: https://doi.org/10.1134/S1063785016040271
- ID: 198792
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Abstract
Thin ferroelectric BaxSr1–xTiO3 (BST) layers have been grown for the first time on semi-insulating silicon carbide substrates by RF magnetron sputtering of a ceramic target without using buffer sublayers. Results of investigation of the structure of obtained BST films and the electrical properties of related planar capacitors are presented. The obtained structures are characterized by high nonlinearity and low dielectric losses at microwave frequencies.
About the authors
A. V. Tumarkin
St. Petersburg State Electrotechnical University (LETI)
Author for correspondence.
Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 197376
S. V. Razumov
St. Petersburg State Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 197376
A. G. Gagarin
St. Petersburg State Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 197376
A. A. Odinets
St. Petersburg State Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 197376
A. K. Mikhailov
St. Petersburg State Electrotechnical University (LETI); Dagestan State University
Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 197376; Makhachkala, Dagestan, 367000
I. P. Pronin
Ioffe Physical Technical Institute
Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 194021
V. M. Stozharov
Herzen State Pedagogical University of Russia
Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 191186
S. V. Senkevich
Ioffe Physical Technical Institute
Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 194021
N. K. Travin
Svetlana–Electronpribor Corporation
Email: avtumarkin@yandex.ru
Russian Federation, St. Petersburg, 194156
