Regular Microstructures Based on Polyethylene Terephthalate Films


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Abstract

A method for forming regular dielectric and metallic microstructures based on polyethylene terephthalate films irradiated with a synchrotron radiation source through a mask with subsequent etching. To study their geometric parameters, scanning electron microscopy was used.

About the authors

V. E. Asadchikov

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

Author for correspondence.
Email: asad@crys.ras.ru
Russian Federation, Moscow, 119333

S. A. Bedin

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences; Moscow Pedagogical State University

Email: asad@crys.ras.ru
Russian Federation, Moscow, 119333; Moscow, 119991

A. B. Vasil’ev

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

Email: asad@crys.ras.ru
Russian Federation, Moscow, 119333

Yu. V. Grigor’ev

Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,”
Russian Academy of Sciences

Email: asad@crys.ras.ru
Russian Federation, Moscow, 119333

V. P. Naz’mov

Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences

Email: asad@crys.ras.ru
Russian Federation, Novosibirsk, 630090


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