Ferroelectric Barium Zirconate Titanate Films on Sapphire Substrates

Abstract

The structural and electrical physical properties of barium titanate zirconate thin films on pure sapphire substrates and sapphire substrates with a platinum sublayer are investigated. The nature of substrate is shown to have a considerable effect on the crystal structure, phase composition, and electrical parameters of the prepared thin films. Capacitive elements fabricated using barium zirconate titanate films display high nonlinearity at low dielectric losses, as measured at a frequency of 2 GHz.