Ferroelectric Barium Zirconate Titanate Films on Sapphire Substrates
- Autores: Tumarkin A.1, Zlygostov M.1, Gagarin A.1, Sapego E.1
-
Afiliações:
- St. Petersburg Electrotechnical University (LETI)
- Edição: Volume 44, Nº 12 (2018)
- Páginas: 1077-1080
- Seção: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/208061
- DOI: https://doi.org/10.1134/S1063785018120374
- ID: 208061
Citar
Resumo
The structural and electrical physical properties of barium titanate zirconate thin films on pure sapphire substrates and sapphire substrates with a platinum sublayer are investigated. The nature of substrate is shown to have a considerable effect on the crystal structure, phase composition, and electrical parameters of the prepared thin films. Capacitive elements fabricated using barium zirconate titanate films display high nonlinearity at low dielectric losses, as measured at a frequency of 2 GHz.
Sobre autores
A. Tumarkin
St. Petersburg Electrotechnical University (LETI)
Autor responsável pela correspondência
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 197022
M. Zlygostov
St. Petersburg Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 197022
A. Gagarin
St. Petersburg Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 197022
E. Sapego
St. Petersburg Electrotechnical University (LETI)
Email: avtumarkin@yandex.ru
Rússia, St. Petersburg, 197022