Dielectric Losses in MPCVD Diamonds in the 25–30 and 250–350 GHz Bands Depending on Growth Parameters
- Authors: Serov E.A.1, Nikolenko A.S.1, Liu Y.Q.2, Ding M.H.2, Tang W.Z.2, Garin B.M.3, Parshin V.V.1
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Affiliations:
- Institute of Applied Physics
- University of Science and Technology of Beijing
- Institute of Radioengineering and Electronics (Fryazino Branch)
- Issue: Vol 44, No 11 (2018)
- Pages: 956-958
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/208011
- DOI: https://doi.org/10.1134/S106378501811007X
- ID: 208011
Cite item
Abstract
A complex systematic study of the effect of various parameters of the CVD diamond growth in a microwave plasma (MPCVD diamonds), such as substrate temperature, the chemical composition of a gas mixture, etc., on dielectric losses in two frequency bands (25–30 and 250–350 GHz) for more than ten samples of various series is carried out. A correlation between the values of the losses in these two frequency bands is identified.
About the authors
E. A. Serov
Institute of Applied Physics
Email: bormigar@yandex.ru
Russian Federation, Nizhny Novgorod, 603155
A. S. Nikolenko
Institute of Applied Physics
Email: bormigar@yandex.ru
Russian Federation, Nizhny Novgorod, 603155
Y. Q. Liu
University of Science and Technology of Beijing
Email: bormigar@yandex.ru
China, Beijing, 100083
M. H. Ding
University of Science and Technology of Beijing
Email: bormigar@yandex.ru
China, Beijing, 100083
W. Z. Tang
University of Science and Technology of Beijing
Email: bormigar@yandex.ru
China, Beijing, 100083
B. M. Garin
Institute of Radioengineering and Electronics (Fryazino Branch)
Author for correspondence.
Email: bormigar@yandex.ru
Russian Federation, Fryazino, Moscow oblast, 141190
V. V. Parshin
Institute of Applied Physics
Email: bormigar@yandex.ru
Russian Federation, Nizhny Novgorod, 603155