Dielectric Losses in MPCVD Diamonds in the 25–30 and 250–350 GHz Bands Depending on Growth Parameters

E. A. Serov; A. S. Nikolenko; Y. Q. Liu; M. H. Ding; W. Z. Tang; B. M. Garin; V. V. Parshin

doi:10.1134/S106378501811007X

Dielectric Losses in MPCVD Diamonds in the 25–30 and 250–350 GHz Bands Depending on Growth Parameters

Авторлар: Serov E.¹, Nikolenko A.¹, Liu Y.², Ding M.², Tang W.², Garin B.³, Parshin V.¹
Мекемелер:
1. Institute of Applied Physics
2. University of Science and Technology of Beijing
3. Institute of Radioengineering and Electronics (Fryazino Branch)
Шығарылым: Том 44, № 11 (2018)
Беттер: 956-958
Бөлім: Article
URL: https://journals.rcsi.science/1063-7850/article/view/208011
DOI: https://doi.org/10.1134/S106378501811007X
ID: 208011

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Аннотация

A complex systematic study of the effect of various parameters of the CVD diamond growth in a microwave plasma (MPCVD diamonds), such as substrate temperature, the chemical composition of a gas mixture, etc., on dielectric losses in two frequency bands (25–30 and 250–350 GHz) for more than ten samples of various series is carried out. A correlation between the values of the losses in these two frequency bands is identified.