Complex use of the diffraction techniques in depth profiling of the crystal lattice parameter and composition of InGaAs/GaAs gradient layers
- Authors: Baidakova M.V.1,2, Kirilenko D.A.1,2, Sitnikova A.A.1, Yagovkina M.A.1, Klimko G.V.1, Sorokin S.V.1, Sedova I.V.1, Ivanov S.V.1, Romanov A.E.1,2
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Affiliations:
- Ioffe Physical Technical Institute
- St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
- Issue: Vol 42, No 5 (2016)
- Pages: 464-467
- Section: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/198977
- DOI: https://doi.org/10.1134/S1063785016050023
- ID: 198977
Cite item
Abstract
A technique is proposed for testing thick (1 μm and larger) gradient layers with the composition and relaxation degree alternating over the layer depth on the basis of comparative analysis of X-ray scattered intensity maps in the reciprocal space and depth profiles of the crystal lattice parameters obtained by electron microdiffraction. The informativity of the proposed technique is demonstrated using the example of an InxGa1–xAs/GaAs layer with linear depth variation in x. Complex representation of the diffraction data in the form of the depth-profiled reciprocal space map allows taking into account the additional relaxation caused by thinning electron microscopy specimens.
About the authors
M. V. Baidakova
Ioffe Physical Technical Institute; St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Author for correspondence.
Email: baidakova@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 197101
D. A. Kirilenko
Ioffe Physical Technical Institute; St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Email: baidakova@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 197101
A. A. Sitnikova
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
M. A. Yagovkina
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
G. V. Klimko
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
S. V. Sorokin
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
I. V. Sedova
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
S. V. Ivanov
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
A. E. Romanov
Ioffe Physical Technical Institute; St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Email: baidakova@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 197101