Complex use of the diffraction techniques in depth profiling of the crystal lattice parameter and composition of InGaAs/GaAs gradient layers
- 作者: Baidakova M.1,2, Kirilenko D.1,2, Sitnikova A.1, Yagovkina M.1, Klimko G.1, Sorokin S.1, Sedova I.1, Ivanov S.1, Romanov A.1,2
-
隶属关系:
- Ioffe Physical Technical Institute
- St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
- 期: 卷 42, 编号 5 (2016)
- 页面: 464-467
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7850/article/view/198977
- DOI: https://doi.org/10.1134/S1063785016050023
- ID: 198977
如何引用文章
详细
A technique is proposed for testing thick (1 μm and larger) gradient layers with the composition and relaxation degree alternating over the layer depth on the basis of comparative analysis of X-ray scattered intensity maps in the reciprocal space and depth profiles of the crystal lattice parameters obtained by electron microdiffraction. The informativity of the proposed technique is demonstrated using the example of an InxGa1–xAs/GaAs layer with linear depth variation in x. Complex representation of the diffraction data in the form of the depth-profiled reciprocal space map allows taking into account the additional relaxation caused by thinning electron microscopy specimens.
作者简介
M. Baidakova
Ioffe Physical Technical Institute; St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
编辑信件的主要联系方式.
Email: baidakova@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021; St. Petersburg, 197101
D. Kirilenko
Ioffe Physical Technical Institute; St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Email: baidakova@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021; St. Petersburg, 197101
A. Sitnikova
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
M. Yagovkina
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
G. Klimko
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
S. Sorokin
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
I. Sedova
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
S. Ivanov
Ioffe Physical Technical Institute
Email: baidakova@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021
A. Romanov
Ioffe Physical Technical Institute; St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO University)
Email: baidakova@mail.ioffe.ru
俄罗斯联邦, St. Petersburg, 194021; St. Petersburg, 197101