Measurement Error of Interferometers with Diffraction Reference Wave
- 作者: Akhsakhalyan A.1, Gavrilin D.1, Malyshev I.1, Salashchenko N.1, Toropov M.1, Ulasevich B.1, Tsybin N.1, Chkhalo N.1
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隶属关系:
- Institute for Physics of Microstructures, Russian Academy of Sciences
- 期: 卷 64, 编号 11 (2019)
- 页面: 1698-1703
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7842/article/view/204671
- DOI: https://doi.org/10.1134/S1063784219110021
- ID: 204671
如何引用文章
详细
An experimental setup and results on aberration of sources of a reference spherical wave (SRSW) based on a single-mode optical fiber with a subwavelength output aperture obtained with the aid of an optical part of recording system (OPRS) are presented. SRSW and OPRS are developed for referenceless interferometer with diffraction reference wave. Methods for minimization of the measurement error are proposed. The SRSW and OPRS provide subnanometer measurement accuracy for optics. An increase in the measurement accuracy of the interferometer to a picometer level is discussed.
作者简介
A. Akhsakhalyan
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950
D. Gavrilin
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950
I. Malyshev
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950
N. Salashchenko
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950
M. Toropov
Institute for Physics of Microstructures, Russian Academy of Sciences
编辑信件的主要联系方式.
Email: toropov@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950
B. Ulasevich
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950
N. Tsybin
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950
N. Chkhalo
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950