Measurement Error of Interferometers with Diffraction Reference Wave
- Авторы: Akhsakhalyan A.1, Gavrilin D.1, Malyshev I.1, Salashchenko N.1, Toropov M.1, Ulasevich B.1, Tsybin N.1, Chkhalo N.1
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Учреждения:
- Institute for Physics of Microstructures, Russian Academy of Sciences
- Выпуск: Том 64, № 11 (2019)
- Страницы: 1698-1703
- Раздел: Article
- URL: https://journals.rcsi.science/1063-7842/article/view/204671
- DOI: https://doi.org/10.1134/S1063784219110021
- ID: 204671
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Аннотация
An experimental setup and results on aberration of sources of a reference spherical wave (SRSW) based on a single-mode optical fiber with a subwavelength output aperture obtained with the aid of an optical part of recording system (OPRS) are presented. SRSW and OPRS are developed for referenceless interferometer with diffraction reference wave. Methods for minimization of the measurement error are proposed. The SRSW and OPRS provide subnanometer measurement accuracy for optics. An increase in the measurement accuracy of the interferometer to a picometer level is discussed.
Об авторах
A. Akhsakhalyan
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
Россия, Nizhny Novgorod, 603950
D. Gavrilin
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
Россия, Nizhny Novgorod, 603950
I. Malyshev
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
Россия, Nizhny Novgorod, 603950
N. Salashchenko
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
Россия, Nizhny Novgorod, 603950
M. Toropov
Institute for Physics of Microstructures, Russian Academy of Sciences
Автор, ответственный за переписку.
Email: toropov@ipmras.ru
Россия, Nizhny Novgorod, 603950
B. Ulasevich
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
Россия, Nizhny Novgorod, 603950
N. Tsybin
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
Россия, Nizhny Novgorod, 603950
N. Chkhalo
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: toropov@ipmras.ru
Россия, Nizhny Novgorod, 603950