Simulation of Local Error Correction of the Surface Shape by a Low-Dimensional Ion Beam
- Autores: Chernyshev A.1,2, Malyshev I.1, Pestov A.1, Chkhalo N.1
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Afiliações:
- Institute for Physics of Microstructures, Russian Academy of Sciences
- Lobachevsky State University
- Edição: Volume 64, Nº 11 (2019)
- Páginas: 1560-1565
- Seção: Article
- URL: https://journals.rcsi.science/1063-7842/article/view/204323
- DOI: https://doi.org/10.1134/S1063784219110069
- ID: 204323
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Resumo
We propose an algorithm for solving the problem of local error correction of the surface shape by a low-dimensional ion beam. The algorithm presumes successive sampling running over protrusions relative to the average height aimed at searching for the optimal etching point satisfying the criterion for the reduction of the sum of derivative moduli on the etching spot. It is shown that the new approach makes it possible to considerably extend the range of spatial frequencies accessible to the action for a given dimension of an ion beam.
Sobre autores
A. Chernyshev
Institute for Physics of Microstructures, Russian Academy of Sciences; Lobachevsky State University
Email: aepestov@ipm.sci-nnov.ru
Rússia, Nizhny Novgorod, 607680; Nizhny Novgorod, 603950
I. Malyshev
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: aepestov@ipm.sci-nnov.ru
Rússia, Nizhny Novgorod, 607680
A. Pestov
Institute for Physics of Microstructures, Russian Academy of Sciences
Autor responsável pela correspondência
Email: aepestov@ipm.sci-nnov.ru
Rússia, Nizhny Novgorod, 607680
N. Chkhalo
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: aepestov@ipm.sci-nnov.ru
Rússia, Nizhny Novgorod, 607680