Simulation of Local Error Correction of the Surface Shape by a Low-Dimensional Ion Beam
- Authors: Chernyshev A.K.1,2, Malyshev I.V.1, Pestov A.E.1, Chkhalo N.I.1
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Affiliations:
- Institute for Physics of Microstructures, Russian Academy of Sciences
- Lobachevsky State University
- Issue: Vol 64, No 11 (2019)
- Pages: 1560-1565
- Section: Article
- URL: https://journals.rcsi.science/1063-7842/article/view/204323
- DOI: https://doi.org/10.1134/S1063784219110069
- ID: 204323
Cite item
Abstract
We propose an algorithm for solving the problem of local error correction of the surface shape by a low-dimensional ion beam. The algorithm presumes successive sampling running over protrusions relative to the average height aimed at searching for the optimal etching point satisfying the criterion for the reduction of the sum of derivative moduli on the etching spot. It is shown that the new approach makes it possible to considerably extend the range of spatial frequencies accessible to the action for a given dimension of an ion beam.
About the authors
A. K. Chernyshev
Institute for Physics of Microstructures, Russian Academy of Sciences; Lobachevsky State University
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680; Nizhny Novgorod, 603950
I. V. Malyshev
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680
A. E. Pestov
Institute for Physics of Microstructures, Russian Academy of Sciences
Author for correspondence.
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680
N. I. Chkhalo
Institute for Physics of Microstructures, Russian Academy of Sciences
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680