Simulations of dynamic resistive evaporation in a vacuum
- Authors: Kazanskiy N.L.1, Kolpakov V.A.2, Krichevskiy S.V.2, Podlipnov V.V.1,2
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Affiliations:
- Image Processing Systems Institute, Branch of the Federal Research Center “Crystallography and Photonics,”
- Samara State Aerospace University
- Issue: Vol 62, No 10 (2017)
- Pages: 1490-1495
- Section: Gases and Liquids
- URL: https://journals.rcsi.science/1063-7842/article/view/200093
- DOI: https://doi.org/10.1134/S1063784217100140
- ID: 200093
Cite item
Abstract
The model of dynamic resistive evaporation in vacuum has been considered, and the model takes into account the structural peculiarities of the corresponding evaporator. In the model, the dependences to determine the time of material heating up to evaporation temperature as well as dynamic characteristics of the evaporation have been obtained. It has been shown that the obtained characteristics are nonharmonic and periodically repeated. The adequacy of the developed model to the physical model has been corroborated. It has been found that the discrepancy between the experimental and calculated time characteristics of shutter movement is not higher than 5%. The recommendations for using the suggested model to fabricate of thin films of multicomponent materials via thermal evaporation have been considered.
About the authors
N. L. Kazanskiy
Image Processing Systems Institute, Branch of the Federal Research Center “Crystallography and Photonics,”
Email: kolpakov683@gmail.com
Russian Federation, Samara, 443001
V. A. Kolpakov
Samara State Aerospace University
Author for correspondence.
Email: kolpakov683@gmail.com
Russian Federation, Samara, 443086
S. V. Krichevskiy
Samara State Aerospace University
Email: kolpakov683@gmail.com
Russian Federation, Samara, 443086
V. V. Podlipnov
Image Processing Systems Institute, Branch of the Federal Research Center “Crystallography and Photonics,”; Samara State Aerospace University
Email: kolpakov683@gmail.com
Russian Federation, Samara, 443001; Samara, 443086