Selection and design of the secondary electron channel of the time-of-flight mass spectrometer

Abstract

Computer simulation is carried out for selecting a compact electron-optical system of the channel for detecting secondary electrons formed during the interaction of xenon atoms or ions with energy of 1-30 keV with Xe atoms. The solid angle of passage of secondary electron beams in a wide range of their initial energies is calculated. The energy spectrum of secondary electrons with various energies is determined by constructing their deceleration curve.