Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode
- Authors: Akhmadeev Y.H.1, Denisov V.V.1, Koval N.N.1, Kovalsky S.S.1, Lopatin I.V.1, Schanin P.M.1, Yakovlev V.V.1
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Affiliations:
- Institute of High-Current Electronics, Siberian Branch
- Issue: Vol 43, No 1 (2017)
- Pages: 67-74
- Section: Plasma Diagnostics
- URL: https://journals.rcsi.science/1063-780X/article/view/186393
- DOI: https://doi.org/10.1134/S1063780X17010020
- ID: 186393
Cite item
Abstract
Generation of plasma in a pulsed non-self-sustained glow discharge with a hollow cathode with an area of ≥2 m2 at gas pressures of 0.4–1 Pa was studied experimentally. At an auxiliary arc-discharge current of 100 A and a main discharge voltage of 240 V, a pulse-periodic glow discharge with a current amplitude of 370 A, pulse duration of 340 μs, and repetition rate of 1 kHz was obtained. The possibility of creating a uniform gas-discharge plasma with a density of up to 1012 cm−3 and an electron temperature of 1 eV in a volume of >0.2 m3 was demonstrated. Such plasma can be efficiently used to treat material surfaces and generate pulsed ion beams with a current density of up to 15 mA/cm2.
About the authors
Yu. H. Akhmadeev
Institute of High-Current Electronics, Siberian Branch
Email: volodyadenisov@yandex.ru
Russian Federation, Tomsk, 634055
V. V. Denisov
Institute of High-Current Electronics, Siberian Branch
Author for correspondence.
Email: volodyadenisov@yandex.ru
Russian Federation, Tomsk, 634055
N. N. Koval
Institute of High-Current Electronics, Siberian Branch
Email: volodyadenisov@yandex.ru
Russian Federation, Tomsk, 634055
S. S. Kovalsky
Institute of High-Current Electronics, Siberian Branch
Email: volodyadenisov@yandex.ru
Russian Federation, Tomsk, 634055
I. V. Lopatin
Institute of High-Current Electronics, Siberian Branch
Email: volodyadenisov@yandex.ru
Russian Federation, Tomsk, 634055
P. M. Schanin
Institute of High-Current Electronics, Siberian Branch
Email: volodyadenisov@yandex.ru
Russian Federation, Tomsk, 634055
V. V. Yakovlev
Institute of High-Current Electronics, Siberian Branch
Email: volodyadenisov@yandex.ru
Russian Federation, Tomsk, 634055