Gas-phase clusterization of zinc during magnetron sputtering

详细

The processes of gas-phase clusterization of zinc during dc magnetron sputtering of a zinc target in an argon atmosphere have been investigated. The influence of the working gas pressure and magnetron discharge current on the morphology and structure of the precipitates formed on substrates previously cooled to–50°С is studied. It is shown that dense textured (002)Zn layers with a columnar structure are formed at relatively low argon pressures in the chamber (P = 0.5 Pa) and low discharge currents (100 mA). X-ray amorphous deposits with a fractal coral-like structure arise on substrates at an extremely high argon pressure in the chamber (P = 5 Pa). An increase in the magnetron discharge current at an operating gas pressure of 5 Pa leads to the formation of polycrystalline layers on substrates; the intensity of the XRD peaks related to crystalline zinc increases with an increase in the discharge current. Possible mechanisms of the structural transformation of Zn deposits are considered.