Changes in the Structure and Properties of Quartz Successively Implanted by Zn and F Ions during Thermal Annealing
- Authors: Privezentsev V.V.1, Steinman E.A.2, Tereshchenko A.N.2, Kolesnikov N.N.2, Makunin A.V.3
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Affiliations:
- Valiev Institute of Physics and Technology, Russian Academy of Sciences
- Institute of Solid State Physics, Russian Academy of Sciences
- Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
- Issue: Vol 64, No 3 (2019)
- Pages: 451-456
- Section: Surface and Thin Films
- URL: https://journals.rcsi.science/1063-7745/article/view/193972
- DOI: https://doi.org/10.1134/S1063774519030210
- ID: 193972
Cite item
Abstract
The temperature dependences of structural and phase transformations in quartz successively implanted by zinc and fluorine during annealing in nitrogen have been studied. Plates were doped with 64Zn+ ions to a dose of 5 × 1016 cm–2 with an energy of 50 keV and then with 19F+ ions to the same dose but with an energy of 17 keV. After the implantation, individual Zn-containing particles about 100 nm in size were found on the sample surface. These particles decrease in size during annealing (by an order of magnitude after annealing at 800°C). The implantation leads to the formation of radiation-induced point defects and their clusters in the quartz bulk. Radiation-induced defects are gradually annealed during the heat treatment, and the phase of metallic zinc is transformed first to its zinc oxide (ZnO) at 600°C and then to willemite (Zn2SiO4) at 800°C.
About the authors
V. V. Privezentsev
Valiev Institute of Physics and Technology, Russian Academy of Sciences
Author for correspondence.
Email: privezentsev@ftian.ru
Russian Federation, Moscow, 117218
E. A. Steinman
Institute of Solid State Physics, Russian Academy of Sciences
Email: privezentsev@ftian.ru
Russian Federation, Chernogolovka, Moscow oblast, 142432
A. N. Tereshchenko
Institute of Solid State Physics, Russian Academy of Sciences
Email: privezentsev@ftian.ru
Russian Federation, Chernogolovka, Moscow oblast, 142432
N. N. Kolesnikov
Institute of Solid State Physics, Russian Academy of Sciences
Email: privezentsev@ftian.ru
Russian Federation, Chernogolovka, Moscow oblast, 142432
A. V. Makunin
Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
Email: privezentsev@ftian.ru
Russian Federation, Moscow, 119991