Changes in the Structure and Properties of Quartz Successively Implanted by Zn and F Ions during Thermal Annealing
- Авторы: Privezentsev V.V.1, Steinman E.A.2, Tereshchenko A.N.2, Kolesnikov N.N.2, Makunin A.V.3
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Учреждения:
- Valiev Institute of Physics and Technology, Russian Academy of Sciences
- Institute of Solid State Physics, Russian Academy of Sciences
- Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
- Выпуск: Том 64, № 3 (2019)
- Страницы: 451-456
- Раздел: Surface and Thin Films
- URL: https://journals.rcsi.science/1063-7745/article/view/193972
- DOI: https://doi.org/10.1134/S1063774519030210
- ID: 193972
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Аннотация
The temperature dependences of structural and phase transformations in quartz successively implanted by zinc and fluorine during annealing in nitrogen have been studied. Plates were doped with 64Zn+ ions to a dose of 5 × 1016 cm–2 with an energy of 50 keV and then with 19F+ ions to the same dose but with an energy of 17 keV. After the implantation, individual Zn-containing particles about 100 nm in size were found on the sample surface. These particles decrease in size during annealing (by an order of magnitude after annealing at 800°C). The implantation leads to the formation of radiation-induced point defects and their clusters in the quartz bulk. Radiation-induced defects are gradually annealed during the heat treatment, and the phase of metallic zinc is transformed first to its zinc oxide (ZnO) at 600°C and then to willemite (Zn2SiO4) at 800°C.
Об авторах
V. Privezentsev
Valiev Institute of Physics and Technology, Russian Academy of Sciences
Автор, ответственный за переписку.
Email: privezentsev@ftian.ru
Россия, Moscow, 117218
E. Steinman
Institute of Solid State Physics, Russian Academy of Sciences
Email: privezentsev@ftian.ru
Россия, Chernogolovka, Moscow oblast, 142432
A. Tereshchenko
Institute of Solid State Physics, Russian Academy of Sciences
Email: privezentsev@ftian.ru
Россия, Chernogolovka, Moscow oblast, 142432
N. Kolesnikov
Institute of Solid State Physics, Russian Academy of Sciences
Email: privezentsev@ftian.ru
Россия, Chernogolovka, Moscow oblast, 142432
A. Makunin
Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University
Email: privezentsev@ftian.ru
Россия, Moscow, 119991
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