Email this article Synthesis of the Autocorrelation Function for Solving the Thin Film Reflectometry Inverse Problem
- Authors: Astaf’ev S.B.1, Yanusova L.G.1
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Affiliations:
- Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,” Russian Academy of Sciences119333
- Issue: Vol 64, No 1 (2019)
- Pages: 119-121
- Section: Surface and Thin Films
- URL: https://journals.rcsi.science/1063-7745/article/view/193652
- DOI: https://doi.org/10.1134/S1063774518060020
- ID: 193652
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Abstract
A method is proposed to estimate (using the autocorrelation function (ACF)) the thickness of layers determining the electron density profile of a thin film. The method does not require additional conditions and is applicable to an arbitrary reflectivity curve. It is based on the ACF synthesis by a superposition of Gaussians, whose parameters are related to the characteristics of the film layers and interfaces. The potential of this method is demonstrated by a number of model examples.
About the authors
S. B. Astaf’ev
Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences119333
Author for correspondence.
Email: bard@crys.ras.ru
Russian Federation, Moscow
L. G. Yanusova
Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences119333
Email: bard@crys.ras.ru
Russian Federation, Moscow
