The possibility of identifying the spatial location of single dislocations by topo-tomography on laboratory setups


Cite item

Full Text

Open Access Open Access
Restricted Access Access granted
Restricted Access Subscription Access

Abstract

The spatial arrangement of single linear defects in a Si single crystal (input surface {111}) has been investigated by X-ray topo-tomography using laboratory X-ray sources. The experimental technique and the procedure of reconstructing a 3D image of dislocation half-loops near the Si crystal surface are described. The sizes of observed linear defects with a spatial resolution of about 10 μm are estimated.

About the authors

D. A. Zolotov

Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”

Author for correspondence.
Email: zolotovden@crys.ras.ru
Russian Federation, Moscow, 119333

A. V. Buzmakov

Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”

Email: zolotovden@crys.ras.ru
Russian Federation, Moscow, 119333

D. A. Elfimov

Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”; Moscow State University

Email: zolotovden@crys.ras.ru
Russian Federation, Moscow, 119333; Moscow, 119991

V. E. Asadchikov

Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”; Moscow State University

Email: zolotovden@crys.ras.ru
Russian Federation, Moscow, 119333; Moscow, 119991

F. N. Chukhovskii

Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”

Email: zolotovden@crys.ras.ru
Russian Federation, Moscow, 119333

Supplementary files

Supplementary Files
Action
1. JATS XML

Copyright (c) 2017 Pleiades Publishing, Inc.