Radio-Wave Method of Control of the Heterogeneity of the Electrophysical Parameters of Dielectrics Using a Scanning Microstrip Line

Аннотация

The parameter homogeneity of dielectrics imposes increasingly stringent requirements, especially when used in micro- and nanoelectronics products. In this paper, we present an automated method for monitoring the electrophysical parameters of planar dielectrics with increased requirements on accuracy and resolution. A brief review and comparative analysis of the known methods for monitoring the parameters of solid dielectrics are performed here. The method of microwave control of the heterogeneities of the parameters of planar dielectrics by the wave characteristics of a scanning microstrip line (MSL) using a Radon transform is described. The phase response of the MSL is shown to be most sensitive to parameter heterogeneities. A mathematical model for processing the MSL wave characteristics and for constructing a map of the parameter heterogeneity distribution is presented. The parameter realizability and the applicability limits of the mathematical model are estimated. The technical implementation of the method is considered using, as an example, the setup for monitoring the parameter homogeneity of planar dielectrics and the results of modeling the measuring part of the setup in the AWR Microwave Office CAD system. The methodological errors of measuring the electrophysical parameters of dielectrics by the described method are estimated, and they are on average ±1 × 10^–4 in the case of measuring the permittivity and 0.2 mm in the case of measuring the spatial resolution according to the preliminary calculations. The described control method is designed for use in the production of electronic products using dielectric materials with a high level of parameter repeatability.