Effect of substrate temperature on the properties of LiNbO 3  nanocrystalline films during pulsed laser deposition

Z. E. Vakulov; E. G. Zamburg; D. A. Golosov; S. M. Zavadskiy; A. V. Miakonkikh; I. E. Clemente; K. V. Rudenko; A. P. Dostanko; O. A. Ageev

doi:10.3103/S1062873817120309

Effect of substrate temperature on the properties of LiNbO₃ nanocrystalline films during pulsed laser deposition

作者: Vakulov Z.E.¹, Zamburg E.G.¹^,2, Golosov D.A.³, Zavadskiy S.M.³, Miakonkikh A.V.⁴, Clemente I.E.⁴, Rudenko K.V.⁴, Dostanko A.P.³, Ageev O.A.¹
隶属关系:
1. Institute of Nanotechnologies, Electronics, and Equipment Engineering
2. Institute of Microengineering
3. Belarusian State University of Informatics and Radioelectronics
4. Institute of Physics and Technology
期: 卷 81, 编号 12 (2017)
页面: 1476-1480
栏目: Article
URL: https://journals.rcsi.science/1062-8738/article/view/185256
DOI: https://doi.org/10.3103/S1062873817120309
ID: 185256

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The results are presented from studying the effect substrate temperature has on the morphological, electrophysical, and optical parameters of LiNbO₃ films obtained via pulsed laser deposition. It is established that films formed at temperatures of 300 to 600°C have a nanocrystalline structure with crystallites predominantly oriented in planes (110), (1010), and (220). The refractive index of the obtained films in the wavelength range of 500–800 nm varies from 2.13 to 2.26.