Effect of substrate temperature on the properties of LiNbO3 nanocrystalline films during pulsed laser deposition
- Authors: Vakulov Z.E.1, Zamburg E.G.1,2, Golosov D.A.3, Zavadskiy S.M.3, Miakonkikh A.V.4, Clemente I.E.4, Rudenko K.V.4, Dostanko A.P.3, Ageev O.A.1
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Affiliations:
- Institute of Nanotechnologies, Electronics, and Equipment Engineering
- Institute of Microengineering
- Belarusian State University of Informatics and Radioelectronics
- Institute of Physics and Technology
- Issue: Vol 81, No 12 (2017)
- Pages: 1476-1480
- Section: Article
- URL: https://journals.rcsi.science/1062-8738/article/view/185256
- DOI: https://doi.org/10.3103/S1062873817120309
- ID: 185256
Cite item
Abstract
The results are presented from studying the effect substrate temperature has on the morphological, electrophysical, and optical parameters of LiNbO3 films obtained via pulsed laser deposition. It is established that films formed at temperatures of 300 to 600°C have a nanocrystalline structure with crystallites predominantly oriented in planes (110), (1010), and (220). The refractive index of the obtained films in the wavelength range of 500–800 nm varies from 2.13 to 2.26.
About the authors
Z. E. Vakulov
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Author for correspondence.
Email: zvakulov@sfedu.ru
Russian Federation, Taganrog, 347922
E. G. Zamburg
Institute of Nanotechnologies, Electronics, and Equipment Engineering; Institute of Microengineering
Email: zvakulov@sfedu.ru
Russian Federation, Taganrog, 347922; Neuchâtel, CH-2000
D. A. Golosov
Belarusian State University of Informatics and Radioelectronics
Email: zvakulov@sfedu.ru
Belarus, Minsk, 220013
S. M. Zavadskiy
Belarusian State University of Informatics and Radioelectronics
Email: zvakulov@sfedu.ru
Belarus, Minsk, 220013
A. V. Miakonkikh
Institute of Physics and Technology
Email: zvakulov@sfedu.ru
Russian Federation, Moscow, 117218
I. E. Clemente
Institute of Physics and Technology
Email: zvakulov@sfedu.ru
Russian Federation, Moscow, 117218
K. V. Rudenko
Institute of Physics and Technology
Email: zvakulov@sfedu.ru
Russian Federation, Moscow, 117218
A. P. Dostanko
Belarusian State University of Informatics and Radioelectronics
Email: zvakulov@sfedu.ru
Belarus, Minsk, 220013
O. A. Ageev
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Email: zvakulov@sfedu.ru
Russian Federation, Taganrog, 347922
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