Effect of substrate temperature on the properties of LiNbO3 nanocrystalline films during pulsed laser deposition


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Abstract

The results are presented from studying the effect substrate temperature has on the morphological, electrophysical, and optical parameters of LiNbO3 films obtained via pulsed laser deposition. It is established that films formed at temperatures of 300 to 600°C have a nanocrystalline structure with crystallites predominantly oriented in planes (110), (1010), and (220). The refractive index of the obtained films in the wavelength range of 500–800 nm varies from 2.13 to 2.26.

About the authors

Z. E. Vakulov

Institute of Nanotechnologies, Electronics, and Equipment Engineering

Author for correspondence.
Email: zvakulov@sfedu.ru
Russian Federation, Taganrog, 347922

E. G. Zamburg

Institute of Nanotechnologies, Electronics, and Equipment Engineering; Institute of Microengineering

Email: zvakulov@sfedu.ru
Russian Federation, Taganrog, 347922; Neuchâtel, CH-2000

D. A. Golosov

Belarusian State University of Informatics and Radioelectronics

Email: zvakulov@sfedu.ru
Belarus, Minsk, 220013

S. M. Zavadskiy

Belarusian State University of Informatics and Radioelectronics

Email: zvakulov@sfedu.ru
Belarus, Minsk, 220013

A. V. Miakonkikh

Institute of Physics and Technology

Email: zvakulov@sfedu.ru
Russian Federation, Moscow, 117218

I. E. Clemente

Institute of Physics and Technology

Email: zvakulov@sfedu.ru
Russian Federation, Moscow, 117218

K. V. Rudenko

Institute of Physics and Technology

Email: zvakulov@sfedu.ru
Russian Federation, Moscow, 117218

A. P. Dostanko

Belarusian State University of Informatics and Radioelectronics

Email: zvakulov@sfedu.ru
Belarus, Minsk, 220013

O. A. Ageev

Institute of Nanotechnologies, Electronics, and Equipment Engineering

Email: zvakulov@sfedu.ru
Russian Federation, Taganrog, 347922

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