Ion-beam formation and track modification of InAs nanoclusters in silicon and silica
- Autores: Komarov F.F.1, Milchanin O.V.1, Skuratov V.A.2, Makhavikou M.A.1, Janse van Vuuren A.3, Neethling J.N.3, Wendler E.4, Vlasukova L.A.5, Parkhomenko I.N.5, Yuvchenko V.N.1
-
Afiliações:
- Sevchenko Institute of Applied Physical Problems
- Joint Institute for Nuclear Research
- Centre for High Resolution Transmission Electron Microscopy
- Friedrich Schiller University Jena
- Belarusian State University
- Edição: Volume 80, Nº 2 (2016)
- Páginas: 141-145
- Seção: Proceedings of the 22nd International Conference “Ion-Surface Interaction (ISI-2015)”
- URL: https://journals.rcsi.science/1062-8738/article/view/183827
- DOI: https://doi.org/10.3103/S106287381602012X
- ID: 183827
Citar
Resumo
The implantation formation of InAs nanoclusters in silicon and silica and their modification via irradiation with Xe ions with an energy of 167 MeV and a fluence of 3 × 1014 cm–2 are studied. It is found that post-implantation annealing and irradiation with high-energy ions alter the size and shape of nanoclusters and cause structural transformations within them. The ordering of nanoclusters and their elongation along the trajectory of Xe ions in a SiO2 matrix is observed.
Sobre autores
F. Komarov
Sevchenko Institute of Applied Physical Problems
Autor responsável pela correspondência
Email: komarovf@bsu.by
Belarus, Minsk, 220030
O. Milchanin
Sevchenko Institute of Applied Physical Problems
Email: komarovf@bsu.by
Belarus, Minsk, 220030
V. Skuratov
Joint Institute for Nuclear Research
Email: komarovf@bsu.by
Rússia, Dubna, 141980
M. Makhavikou
Sevchenko Institute of Applied Physical Problems
Email: komarovf@bsu.by
Belarus, Minsk, 220030
A. Janse van Vuuren
Centre for High Resolution Transmission Electron Microscopy
Email: komarovf@bsu.by
República da África do Sul, Port Elizabeth, 6031
J. Neethling
Centre for High Resolution Transmission Electron Microscopy
Email: komarovf@bsu.by
República da África do Sul, Port Elizabeth, 6031
E. Wendler
Friedrich Schiller University Jena
Email: komarovf@bsu.by
Alemanha, Jena, 07743
L. Vlasukova
Belarusian State University
Email: komarovf@bsu.by
Belarus, Minsk, 220030
I. Parkhomenko
Belarusian State University
Email: komarovf@bsu.by
Belarus, Minsk, 220030
V. Yuvchenko
Sevchenko Institute of Applied Physical Problems
Email: komarovf@bsu.by
Belarus, Minsk, 220030
Arquivos suplementares
