Enviar artigo por via de e-mail IR Spectroscopy and Raman Spectroscopy for Controlling and Investigating Thin-Film Coatings
- Autores: Vinogradov E.A.1
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Afiliações:
- Institute of Spectroscopy
- Edição: Volume 82, Nº 8 (2018)
- Páginas: 993-997
- Seção: Proceedings of the XII International Scientific School-Seminar “Fundamental Research and Innovation: Nanooptics, Photonics, and Coherent Spectroscopy”
- URL: https://journals.rcsi.science/1062-8738/article/view/185952
- DOI: https://doi.org/10.3103/S1062873818080427
- ID: 185952
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Resumo
Vibrational spectroscopy is used to characterize inorganic solid, superhard, and anticorrosive thin-film coatings prepared via magnetron sputtering and surface chemical reactions. The most detailed and correct information on the parameters of the dielectric function of coatings can be obtained from the frequency angular spectra of phonon polaritons. Optical characteristics of coatings are considered using examples of SiOxNy and SiOx films grown on steel and silicon substrates.
Sobre autores
E. Vinogradov
Institute of Spectroscopy
Autor responsável pela correspondência
Email: evinogr@isan.troitsk.ru
Rússia, Troitsk, Moscow oblast, 108840
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