电邮这篇文章 IR Spectroscopy and Raman Spectroscopy for Controlling and Investigating Thin-Film Coatings
- 作者: Vinogradov E.A.1
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隶属关系:
- Institute of Spectroscopy
- 期: 卷 82, 编号 8 (2018)
- 页面: 993-997
- 栏目: Proceedings of the XII International Scientific School-Seminar “Fundamental Research and Innovation: Nanooptics, Photonics, and Coherent Spectroscopy”
- URL: https://journals.rcsi.science/1062-8738/article/view/185952
- DOI: https://doi.org/10.3103/S1062873818080427
- ID: 185952
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详细
Vibrational spectroscopy is used to characterize inorganic solid, superhard, and anticorrosive thin-film coatings prepared via magnetron sputtering and surface chemical reactions. The most detailed and correct information on the parameters of the dielectric function of coatings can be obtained from the frequency angular spectra of phonon polaritons. Optical characteristics of coatings are considered using examples of SiOxNy and SiOx films grown on steel and silicon substrates.
作者简介
E. Vinogradov
Institute of Spectroscopy
编辑信件的主要联系方式.
Email: evinogr@isan.troitsk.ru
俄罗斯联邦, Troitsk, Moscow oblast, 108840
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