One possibility of mathematically modeling the thermal effect of a finely focused electron beam on a homogeneous semiconductor

Abstract

The problem of heat distribution in materials irradiated with finely focused medium-energy electron beams is considered by means of mathematical simulation. A model is developed by solving a multidimensional heat-transfer steady equation using the Green function. A model that can be applied to a broad class of solid bodies and the range of energies of primary electrons is used as the source function. Some results are illustrated using the example of semiconductor materials used in electronics.