Email this article An instrument for simultaneous visual and thermal testing of microelectronic devices
- Authors: Machikhin A.S.1, Batshev V.I.2
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Affiliations:
- Moscow Power Engineering Institute (Technical University)
- Bauman State Technical University
- Issue: Vol 52, No 2 (2016)
- Pages: 112-117
- Section: Integrated Methods
- URL: https://journals.rcsi.science/1061-8309/article/view/181106
- DOI: https://doi.org/10.1134/S1061830916020042
- ID: 181106
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Abstract
The problem of simultaneous visual and thermal testing of microobjects is considered. For this purpose, a mirror–lens optical system is proposed and constructed. The system has no movable elements and provides identical scales of images in spectral ranges of 0.4–0.8 and 8–14 μm. The technique for calculating its dimensions and an experimental setup on the basis of this scheme are described. The results of its testing using an example of investigating microelectronic devices are presented.
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About the authors
A. S. Machikhin
Moscow Power Engineering Institute (Technical University)
Author for correspondence.
Email: aalexanderr@mail.ru
Russian Federation, ul. Krasnokazarmennaya 14, Moscow, 111250
V. I. Batshev
Bauman State Technical University
Email: aalexanderr@mail.ru
Russian Federation, Vtoraya Baumanskaya ul. 5, Moscow, 105005
