An instrument for simultaneous visual and thermal testing of microelectronic devices
- Авторы: Machikhin A.1, Batshev V.2
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Учреждения:
- Moscow Power Engineering Institute (Technical University)
- Bauman State Technical University
- Выпуск: Том 52, № 2 (2016)
- Страницы: 112-117
- Раздел: Integrated Methods
- URL: https://journals.rcsi.science/1061-8309/article/view/181106
- DOI: https://doi.org/10.1134/S1061830916020042
- ID: 181106
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Аннотация
The problem of simultaneous visual and thermal testing of microobjects is considered. For this purpose, a mirror–lens optical system is proposed and constructed. The system has no movable elements and provides identical scales of images in spectral ranges of 0.4–0.8 and 8–14 μm. The technique for calculating its dimensions and an experimental setup on the basis of this scheme are described. The results of its testing using an example of investigating microelectronic devices are presented.
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Об авторах
A. Machikhin
Moscow Power Engineering Institute (Technical University)
Автор, ответственный за переписку.
Email: aalexanderr@mail.ru
Россия, ul. Krasnokazarmennaya 14, Moscow, 111250
V. Batshev
Bauman State Technical University
Email: aalexanderr@mail.ru
Россия, Vtoraya Baumanskaya ul. 5, Moscow, 105005