Formation of Nanoclusters in Zinc-Implanted Crystalline Quartz

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Abstract

The results of the synthesis of nanoclusters of metallic zinc and its oxide in crystalline quartz implanted with 64Zn+ ions with a dose of 5 × 1016 cm–2 and energy of 40 keV and annealed in an oxygen atmosphere in the temperature range 400–900°C are presented. Scanning electron microscopy combined with energy-dispersive spectroscopy, as well as Auger electron spectroscopy and photoluminescence, were used for the study. After implantation, separate nanoclusters of metallic zinc with a size of less than 1 µm were fixed on the surface and in the near-surface layer of quartz. It was established that, during annealing, the sample underwent a transition from the phase of metallic Zn to the phases of its oxide ZnO and silicate Zn2SiO4. After annealing at 700°C, which is the most optimal for obtaining the ZnO phase, zinc oxide nanoclusters smaller than 500 nm in size were formed in the near-surface layer of quartz. A peak in the form of a doublet at a wavelength of 370 nm was observed in the photoluminescence spectrum due to exciton luminescence in zinc oxide. After annealing at 800°C, the ZnO phase degraded and the zinc silicate phase Zn2SiO4 was formed.

About the authors

V. V. Privezentsev

Scientific Research Institute for System Analysis RAS

Author for correspondence.
Email: v.privezentsev@mail.ru
Russia, 117218, Moscow

A. A. Firsov

Scientific Research Institute for System Analysis RAS

Email: v.privezentsev@mail.ru
Russia, 117218, Moscow

V. S. Kulikauskas

Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics

Email: v.privezentsev@mail.ru
Russia, 119991, Moscow

V. V. Zatekin

Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics

Email: v.privezentsev@mail.ru
Russia, 119991, Moscow

A. N. Tereshchenko

Osipyan Institute of Solid State Physics RAS

Email: v.privezentsev@mail.ru
Russia, 142432, Moscow region, Chernogolovka

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Copyright (c) 2023 В.В. Привезенцев, А.А. Фирсов, В.С. Куликаускас, В.В. Затекин, А.Н. Терещенко

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