Formation of Nanoclusters in Zinc-Implanted Crystalline Quartz

V. V. Privezentsev; Привезенцев В. В.; A. A. Firsov; Фирсов А. А.; V. S. Kulikauskas; Куликаускас В. С.; V. V. Zatekin; Затекин В. В.; A. N. Tereshchenko; Терещенко А. Н.

doi:10.31857/S1028096023030147

Formation of Nanoclusters in Zinc-Implanted Crystalline Quartz

Authors: Privezentsev V.V.¹, Firsov A.A.¹, Kulikauskas V.S.², Zatekin V.V.², Tereshchenko A.N.³
Affiliations:
1. Scientific Research Institute for System Analysis RAS
2. Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics
3. Osipyan Institute of Solid State Physics RAS
Issue: No 3 (2023)
Pages: 53-58
Section: Articles
URL: https://journals.rcsi.science/1028-0960/article/view/137722
DOI: https://doi.org/10.31857/S1028096023030147
EDN: https://elibrary.ru/LFUSDC
ID: 137722

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Abstract

The results of the synthesis of nanoclusters of metallic zinc and its oxide in crystalline quartz implanted with ⁶⁴Zn⁺ ions with a dose of 5 × 10¹⁶ cm^–2 and energy of 40 keV and annealed in an oxygen atmosphere in the temperature range 400–900°C are presented. Scanning electron microscopy combined with energy-dispersive spectroscopy, as well as Auger electron spectroscopy and photoluminescence, were used for the study. After implantation, separate nanoclusters of metallic zinc with a size of less than 1 µm were fixed on the surface and in the near-surface layer of quartz. It was established that, during annealing, the sample underwent a transition from the phase of metallic Zn to the phases of its oxide ZnO and silicate Zn₂SiO₄. After annealing at 700°C, which is the most optimal for obtaining the ZnO phase, zinc oxide nanoclusters smaller than 500 nm in size were formed in the near-surface layer of quartz. A peak in the form of a doublet at a wavelength of 370 nm was observed in the photoluminescence spectrum due to exciton luminescence in zinc oxide. After annealing at 800°C, the ZnO phase degraded and the zinc silicate phase Zn₂SiO₄ was formed.

Keywords

quartz, implantation, zinc, annealing, nanoclusters, zinc oxide, silicate.

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