Email this article Depth Distribution of Radiation Defects under Ion Irradiation of Silicon
- Authors: Novikov N.V.1, Chechenin N.G.1, Shirokova A.A.1
-
Affiliations:
- Moscow State University, Skobeltsyn Institute of Nuclear Physics
- Issue: No 1 (2023)
- Pages: 50-54
- Section: Articles
- URL: https://journals.rcsi.science/1028-0960/article/view/137658
- DOI: https://doi.org/10.31857/S1028096023010181
- EDN: https://elibrary.ru/BLSFQY
- ID: 137658
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Abstract
The defect distribution density reaches its maximum at a depth that depends on the energy and mass of the ion. This depth decreases with increasing angle of incidence due to multiple scattering of primary ions in the surface layers of the target. As the ion mass increases, the maximum defect density increases according to a power law. The asymmetry of the maximum in the depth distribution of defects is associated with an increase in the elastic energy loss during ion stopping and a decrease in the ion transmission coefficient with increasing layer depth.
About the authors
N. V. Novikov
Moscow State University, Skobeltsyn Institute of Nuclear Physics
Author for correspondence.
Email: nvnovikov65@mail.ru
Russia, 119991, Moscow
N. G. Chechenin
Moscow State University, Skobeltsyn Institute of Nuclear Physics
Email: nvnovikov65@mail.ru
Russia, 119991, Moscow
A. A. Shirokova
Moscow State University, Skobeltsyn Institute of Nuclear Physics
Email: nvnovikov65@mail.ru
Russia, 119991, Moscow
References
- Zhang Y., Weber W. J. // Appl. Phys. Rev. 2020. V. 7. P. 041307. https://doi.org/10.1063/5.0027462
- Lindhard J., Nielsen V., Scharff M. et al. // Mat. Fys. Medd. Dan. Vid. Selsk. 1963. V. 33. № 10. P. 1.
- Лейман К. Взаимодействие излучения с твердым телом и образование элементарных дефектов. М.: Атомиздат, 1979. 295 с.
- Nordlund K. // J. Nucl. Mater. 2019. V. 520. P. 273. https://doi.org/10.1016/j.jnucmat.2019.04.028
- Chen E.Y., Deo C., Dingreyille R. // J. Mater. Res. 2019. V. 34. P. 2239. https://doi.org/10.1557/jmr.2019.42
- Chen S., Tamagno P., Bernard D. et al. // Results Phys. 2020. V. 7. P. 03023. https://doi.org/10.1016/j.rinp.2020.103023
- Novikov N.V., Chechenin N.G., Shirokova A.A. // Rad. Eff. Defects Solids. 2021. V. 176. P. 1107. https://doi.org/10.1080/10420150.2021.2007915
- Таперо К.И., Улимов В.Н., Членов А.М. Радиационные эффекты в кремниевых интегральных схемах космического применения. М.: Изд-во БИНОМ Лаборатория знаний, 2014. 302 с.
- Ziegler J., Biersack J.P. SRIM: the Stopping and Range of Ions in Matter. www.srim.org.
- Plimpton S. // J. Comput. Phys. 1995. V. 117. P. 1.
- Allison J., Amako K., Apostolakis J. et al. // Nucl. Instrum. Methods Phys. Res. A. 2016.V. 835. P. 186. geant4.web.cern.ch.
- Ziegler J.F., Biersack J.P., Littmark U. The Stopping and Range of Ions in Matter, N.Y.: Pergamon, 1985.
- Kinchin G.H., Pease R.S. // Rep. Prog. Phys. 1955. V. 18. P. 1.
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