Evaluation of the Use of New Matrix Corrections in Quantitative X-Ray Spectral Analysis

Аннотация

New possibilities for the quantitative description of matrix corrections for the absorption of characteristic X-ray radiation and backscattering of primary beam electrons are considered when solving the direct problem of quantitative X-ray spectral microanalysis. It is shown that the proposed procedure for calculating the given matrix corrections, together with the correctly chosen correction for the stopping power, makes it possible to calculate the quantitative content of elements for a large array of binary compositions from B to U.