Monte Carlo Method in Scanning Electron Microscopy. 2. Problems and Solutions

Abstract

An analysis of the applicability of the Monte Carlo method for modeling images obtained in a scanning electron microscope is presented. It is shown that, in the Monte Carlo method, it is impossible to take into account all mechanisms of the interaction of electrons with matter that influence image formation. The amount of random numbers produced by modern random-number generators is insufficient for the modeling of electron scattering in matter. The time of image modeling on modern personal computers is too long: years of continuous work of a computer. There is no evidence for the correctness of the results given by the Monte Carlo method in image generation. These facts prove the impossibility of applying the Monte Carlo method to modeling electron scattering in solids, which is used for image formation in a scanning electron microscope.