Correction coefficients in X-ray photoelectron spectroscopy

Abstract

Correction coefficients to the photoemission intensity taking into account the processes of multiple elastic scattering in finite-thickness layers are introduced. The presented procedure is based on a description of X-ray photoelectron spectroscopy signals using solutions to boundary-value problems for the equations of photoelectron transport by means of invariant-embedding methods. Exact numerical and smallangle solutions to the obtained equations are presented. A generalization to the case of description of the photoemission cross section is obtained taking nondipole corrections into account.