Vliyanie otzhiga na strukturu poverkhnostnykh sloev dioksida tseriya, poluchennykh metodom magnetronnogo raspyleniya

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Методом магнетронного распыления с применением последующего отжига получены нано- и микроразмерные поверхностные слои диоксида церия CeO2 на основе титанового сплава ВТ6. Структуру образцов определяли с помощью сканирующей электронной микроскопии, электронной Оже-спектроскопии, энергодисперсионной спектроскопии и рентгеновской дифрактрометрии. Показаны линейная зависимость толщины поверхностного слоя от длительности его осаждения и нелинейный ее рост при увеличении мощности источника питания, увеличение шероховатости поверхности, расслаивание и разрыхление поверхностного слоя, предположительно связанные с отжигом. В образцах с поверхностным слоем тоньше 750 нм обнаружено формирование подслоя TiO2, Al2O3 и CeVO4, а при слое <300 нм весь диоксид церия расходовался на объединение с диоксидом ванадия до ванадата.

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