Method for Certification Monitoring of Surface Inhomogeneities of Optics Based on Frequency Analysis of the Surface Profile

D. G. Denisov; N. V. Baryshnikov; Ya. V. Gladysheva; V. E. Karasik; A. B. Morozov; V. E. Patrikeev

doi:10.1007/s11018-017-1160-0

Method for Certification Monitoring of Surface Inhomogeneities of Optics Based on Frequency Analysis of the Surface Profile

作者: Denisov D.G.¹, Baryshnikov N.V.¹, Gladysheva Y.V.¹, Karasik V.E.¹, Morozov A.B.², Patrikeev V.E.²
隶属关系:
1. Bauman Moscow State Technical University
2. Lytkarino Optical Glass Factory
期: 卷 60, 编号 2 (2017)
页面: 121-127
栏目: Nanometrology
URL: https://journals.rcsi.science/0543-1972/article/view/246074
DOI: https://doi.org/10.1007/s11018-017-1160-0
ID: 246074

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详细

A method for determining the rms deviation of the heights of surface inhomogeneities based on an algorithm for calculating the spectral density of the one-dimensional correlation function over a wide range of spatial frequencies is developed and justified scientifically. The methodological errors of the algorithm are analyzed using experimental data from studies on a test stand under production conditions.