Change in the Chemical Composition of an Analyzed Object During Low-Voltage Electron Probe X-Ray Spectral Microanalysis


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Resumo

A phenomenological model is proposed for estimating the changes in the composition of a microscopic volume during low-voltage electron probe x-ray spectral microanalysis. The changes are caused by the thermal effect of the electron probe. Equations are derived which relate the metrological characteristics of low-voltage electron probe x-ray microanalysis to the thermodynamic characteristics of the sample and to the experimental conditions. These results make it possible to choose a priori an analysis mode that avoids errors induced by thermal instability of a test object.

Sobre autores

A. Kuzin

All-Russia Research Institute of Metrological Service (VNIIMS)

Autor responsável pela correspondência
Email: kuzin@vniims.ru
Rússia, Moscow

V. Mityukhlyaev

Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)

Email: kuzin@vniims.ru
Rússia, Moscow

P. Todua

Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)

Email: kuzin@vniims.ru
Rússia, Moscow

M. Filippov

Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)

Email: kuzin@vniims.ru
Rússia, Moscow; Moscow

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