Change in the Chemical Composition of an Analyzed Object During Low-Voltage Electron Probe X-Ray Spectral Microanalysis

详细

A phenomenological model is proposed for estimating the changes in the composition of a microscopic volume during low-voltage electron probe x-ray spectral microanalysis. The changes are caused by the thermal effect of the electron probe. Equations are derived which relate the metrological characteristics of low-voltage electron probe x-ray microanalysis to the thermodynamic characteristics of the sample and to the experimental conditions. These results make it possible to choose a priori an analysis mode that avoids errors induced by thermal instability of a test object.