Email this article Change in the Chemical Composition of an Analyzed Object During Low-Voltage Electron Probe X-Ray Spectral Microanalysis
- Authors: Kuzin A.Y.1, Mityukhlyaev V.B.2, Todua P.A.2, Filippov M.N.2,3
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Affiliations:
- All-Russia Research Institute of Metrological Service (VNIIMS)
- Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
- Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)
- Issue: Vol 59, No 11 (2017)
- Pages: 1234-1237
- Section: Physicochemical Measurements
- URL: https://journals.rcsi.science/0543-1972/article/view/245994
- DOI: https://doi.org/10.1007/s11018-017-1121-7
- ID: 245994
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Abstract
A phenomenological model is proposed for estimating the changes in the composition of a microscopic volume during low-voltage electron probe x-ray spectral microanalysis. The changes are caused by the thermal effect of the electron probe. Equations are derived which relate the metrological characteristics of low-voltage electron probe x-ray microanalysis to the thermodynamic characteristics of the sample and to the experimental conditions. These results make it possible to choose a priori an analysis mode that avoids errors induced by thermal instability of a test object.
About the authors
A. Yu. Kuzin
All-Russia Research Institute of Metrological Service (VNIIMS)
Author for correspondence.
Email: kuzin@vniims.ru
Russian Federation, Moscow
V. B. Mityukhlyaev
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: kuzin@vniims.ru
Russian Federation, Moscow
P. A. Todua
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: kuzin@vniims.ru
Russian Federation, Moscow
M. N. Filippov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)
Email: kuzin@vniims.ru
Russian Federation, Moscow; Moscow
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