Piezoactuators and Piezomotors with Nano- and Micro-Dimensional Resolution for Test and Control Equipment

Аннотация

The state of development and production of test and control equipment with nano- and microsize resolution is investigated. The results of the development analysis are presented, the classification of piezoactuators and piezomotors of the leading manufacturers is compiled. The most characteristic structures of piezoelectric motors are considered. It is shown that stepped piezoelectric motors satisfy the requirements imposed on the actuators of test and control equipment.