Email this article Thermal Effects During Low-Voltage Electron-Probe X-Ray Spectral Microanalysis with Nanometer Localization
- Authors: Kuzin A.Y.1, Stepovich M.A.2, Mityukhlyaev V.B.3, Todua P.A.3, Filippov M.N.3,4
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Affiliations:
- All-Russia Research Institute of Metrological Service (VNIIMS)
- Kaluga State University
- Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
- Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)
- Issue: Vol 59, No 10 (2017)
- Pages: 1061-1064
- Section: Nanometrology
- URL: https://journals.rcsi.science/0543-1972/article/view/245924
- DOI: https://doi.org/10.1007/s11018-017-1092-8
- ID: 245924
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Abstract
The thermal effect of the electron probe during low-voltage x-ray spectral microanalysis with nanometer localization is estimated. It is shown that, for most inorganic materials, thermal effects are unimportant, despite a substantial increase in the volume power density owing to electron bombardment. For organic materials, these effects can have a significant influence on the results and can also damage the sample.
About the authors
A. Yu. Kuzin
All-Russia Research Institute of Metrological Service (VNIIMS)
Author for correspondence.
Email: kuzin@vniims.ru
Russian Federation, Moscow
M. A. Stepovich
Kaluga State University
Email: kuzin@vniims.ru
Russian Federation, Kaluga
V. B. Mityukhlyaev
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: kuzin@vniims.ru
Russian Federation, Moscow
P. A. Todua
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: kuzin@vniims.ru
Russian Federation, Moscow
M. N. Filippov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)
Email: kuzin@vniims.ru
Russian Federation, Moscow; Moscow
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