Отправить статью по E-mail Thermal Effects During Low-Voltage Electron-Probe X-Ray Spectral Microanalysis with Nanometer Localization
- Авторы: Kuzin A.Y.1, Stepovich M.A.2, Mityukhlyaev V.B.3, Todua P.A.3, Filippov M.N.3,4
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Учреждения:
- All-Russia Research Institute of Metrological Service (VNIIMS)
- Kaluga State University
- Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
- Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)
- Выпуск: Том 59, № 10 (2017)
- Страницы: 1061-1064
- Раздел: Nanometrology
- URL: https://journals.rcsi.science/0543-1972/article/view/245924
- DOI: https://doi.org/10.1007/s11018-017-1092-8
- ID: 245924
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Аннотация
The thermal effect of the electron probe during low-voltage x-ray spectral microanalysis with nanometer localization is estimated. It is shown that, for most inorganic materials, thermal effects are unimportant, despite a substantial increase in the volume power density owing to electron bombardment. For organic materials, these effects can have a significant influence on the results and can also damage the sample.
Об авторах
A. Kuzin
All-Russia Research Institute of Metrological Service (VNIIMS)
Автор, ответственный за переписку.
Email: kuzin@vniims.ru
Россия, Moscow
M. Stepovich
Kaluga State University
Email: kuzin@vniims.ru
Россия, Kaluga
V. Mityukhlyaev
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: kuzin@vniims.ru
Россия, Moscow
P. Todua
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: kuzin@vniims.ru
Россия, Moscow
M. Filippov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)
Email: kuzin@vniims.ru
Россия, Moscow; Moscow
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